著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Diagnostics of surface wave excited Kr/O2 plasma for low-temperature oxidation processes,Journal of Applied Physics 102,,,2007,,,13302,https://cir.nii.ac.jp/crid/1010000781980285069,