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Tactics for Picometer Positioning using Active Aerostatic Lubrication
Bibliographic Information
- Title
- Tactics for Picometer Positioning using Active Aerostatic Lubrication
- Author
- H. Mizumoto, Y. Yabuta, S. Arii, Y. Tazoe, Y. Kami
- Published
- 2007
- Resource Type
- journal article
Journal
-
- Proc. of 7th Int. Conf. of euspen Vol. 1
-
Proc. of 7th Int. Conf. of euspen Vol. 1 196-199, 2007
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Details 詳細情報について
-
- CRID
- 1010000781981761284
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
