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Sputter etching effect of the substrate on the microstructure of β-FeSi_2 thin film prepared by ion beam sputter deposition method
Bibliographic Information
- Title
- Sputter etching effect of the substrate on the microstructure of β-FeSi_2 thin film prepared by ion beam sputter deposition method
- Author
- Masato Sasase, Kenichiro Shimura, Kenji Yamaguchi, Hiroyuki Yamamoto, Shin-ichi Shamoto
- Published
- 2007
- Resource Type
- journal article
Journal
-
- Nucl. Instrum. Meth. Phys. Res. B 257
-
Nucl. Instrum. Meth. Phys. Res. B 257 186-189, 2007
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Details 詳細情報について
-
- CRID
- 1010000781986488584
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
