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Aligned defects behaviour of β-FeSi_2 thin film on Si(100)substrate prepared by ion beamsputter deposition
Bibliographic Information
- Title
- Aligned defects behaviour of β-FeSi_2 thin film on Si(100)substrate prepared by ion beamsputter deposition
- Author
- M. Sasase, K. Yamaguchi, H. Yamamoto, S. Shamoto, K. Hojou
- Published
- 2008
- Resource Type
- journal article
Journal
-
- J. Phys . Conf. Ser. 100
-
J. Phys . Conf. Ser. 100 42016-, 2008
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Details 詳細情報について
-
- CRID
- 1010000781986488590
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
