Precise microscopic observation system based on the non-contact rotational mechanism using a micro robot
書誌事項
- タイトル
- Precise microscopic observation system based on the non-contact rotational mechanism using a micro robot
- 著者
- DAIGO MISAKI
収録刊行物
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- Proc.of 2nd Int.Conf.on Positioning Technolog
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Proc.of 2nd Int.Conf.on Positioning Technolog 104-105, 2006