Incorporation of hydrogen in carbon-tungsten co-deposition layers formed by hydrogen plasma sputtering

Bibliographic Information

Title
Incorporation of hydrogen in carbon-tungsten co-deposition layers formed by hydrogen plasma sputtering
Author
K., Katayama・T., Okamura・K., Imaoka・M., Sasaki・Y., Uchida・M., Nishikawa・S., Fukada
Published
2007
Resource Type
journal article

Journal

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Details 詳細情報について

  • CRID
    1010000781989373185
  • Article Type
    journal article
  • Data Source
    • KAKEN

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