Low-Damage Plasma and Photon-Induced Processes for Low-Temperature and Nano-Surface Modification of Materials

Bibliographic Information

Title
Low-Damage Plasma and Photon-Induced Processes for Low-Temperature and Nano-Surface Modification of Materials
Author
Y., Setsuhara

Journal

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Details 詳細情報について

  • CRID
    1010000782007204096
  • Article Type
    journal article
  • Data Source
    • KAKEN

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