Growth mechanism of c-axis oriented AlN on (001) diamond substrates by metal-organic vapor phase epitaxy

Bibliographic Information

Title
Growth mechanism of c-axis oriented AlN on (001) diamond substrates by metal-organic vapor phase epitaxy
Author
Masataka Imura

Journal

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Details 詳細情報について

  • CRID
    1010000782008527488
  • Article Type
    journal article
  • Data Source
    • KAKEN

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