Electrical and Structural Evaluations of Ultrathin SiGe and Ge-on-insulator Fabricated Using Ge Condensation by Dry Oxidation

Bibliographic Information

Title
Electrical and Structural Evaluations of Ultrathin SiGe and Ge-on-insulator Fabricated Using Ge Condensation by Dry Oxidation
Author
H. Yang, D. Wang, H. Gao, K. Hirayama, K. Ikeda, S. Hata, H. Nakashima, H. Nakashima

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Details

  • CRID
    1010000782026200600
  • Article Type
    journal article
  • Data Source
    • KAKEN

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