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Origin of Etch Hillocks Formed on On-Axis SiC(000-1) Surfaces by Molten KOH Etching
Bibliographic Information
- Title
- Origin of Etch Hillocks Formed on On-Axis SiC(000-1) Surfaces by Molten KOH Etching
- Author
- J.Suda, T.Kimoto
- Published
- 2011
- Resource Type
- journal article
Journal
-
- Japanese Journal of Applied Physics
-
Japanese Journal of Applied Physics 50 2011
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Details 詳細情報について
-
- CRID
- 1010000782034831111
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
