Evaluation of EEDF in Microwave Discharge Plasmas by Spectroscopic Diagnostics with Collisional Radiative Model
書誌事項
- タイトル
- Evaluation of EEDF in Microwave Discharge Plasmas by Spectroscopic Diagnostics with Collisional Radiative Model
- 著者
- J.Mizuochi, T.Sakamoto, H.Matsuura, H.Akatsuka
収録刊行物
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- Jpn.J.Appl.Phys. 49
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Jpn.J.Appl.Phys. 49 2010