著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
吉木 宏之,Localized Etching of a Polyimide Film by an Atmospheric-Pressure Radio Frequency Microplasma Excited by a 100-μm-φ Metal Pipe Electrode,Japanese Journal of Applied Physics,,,2010,49,,,https://cir.nii.ac.jp/crid/1010000782044348569,