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Investigation of Plasma Parameters in a VHF plasma with Narrow Gap under High Gaseous Pressure
Bibliographic Information
- Title
- Investigation of Plasma Parameters in a VHF plasma with Narrow Gap under High Gaseous Pressure
- Author
- H.Mita, S.Kishida, M.Tanaka, Y.Yamauchi, T.Baba, Y.Takeuchi, H.Takatsila, Y.Kawai
- Published
- 2009
- Resource Type
- journal article
Journal
-
- Plasma Processes and Polymers 6
-
Plasma Processes and Polymers 6 792-795, 2009
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Details 詳細情報について
-
- CRID
- 1010000782044771741
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN