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Formation of Al_2O_3 Film on Si Substrate by Microwave Generated Remote Plasma Assisted Atomic Layer Deposition Technique
Bibliographic Information
- Title
- Formation of Al_2O_3 Film on Si Substrate by Microwave Generated Remote Plasma Assisted Atomic Layer Deposition Technique
- Author
- H.Ishizaki, Y.Otani, Y.Fukuda, T.Sato, T.Takamatsu, T.Ono
Journal
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- Electrochemical Society, Trans.
-
Electrochemical Society, Trans. 33 227-233, 2010
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Details 詳細情報について
-
- CRID
- 1010000782045180939
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN