Control of inclined sidewall angles of 4H-SiC mesa and trench structures

Bibliographic Information

Title
Control of inclined sidewall angles of 4H-SiC mesa and trench structures
Author
H.Koketsu, T.Hatayama, 他3名

Journal

Related Projects

See more

Details 詳細情報について

  • CRID
    1010000782045205248
  • Article Type
    journal article
  • Data Source
    • KAKEN

Report a problem

Back to top