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Uncertainty of a hybrid surface temperature sensor for silicon wafers and its comparison with an embedded thermocouple
Bibliographic Information
- Title
- Uncertainty of a hybrid surface temperature sensor for silicon wafers and its comparison with an embedded thermocouple
- Author
- T.Iuchi, A.Gogami
- Published
- 2009
- Resource Type
- journal article
Journal
-
- Review of Scientific Instruments 12
-
Review of Scientific Instruments 12 1261091-1261093, 2009
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Details 詳細情報について
-
- CRID
- 1010000782045394826
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
