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Improvements in Electrical Properties of SiC Surface Using Mechano-Chemical Polishing
Bibliographic Information
- Title
- Improvements in Electrical Properties of SiC Surface Using Mechano-Chemical Polishing
- Author
- K.Hotta, K.Hirose, Y.Tanaka, K.Kawata, O.Eryu
- Published
- 2009
- Resource Type
- journal article
Journal
-
- Materials Science Forum 600-603
-
Materials Science Forum 600-603 823-826, 2009
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Details 詳細情報について
-
- CRID
- 1010000782052951169
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
