著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Influence of sputtering parameters on the crystallinity and crystal orientation of AIN layers deposited by RF sputtering using the AIN target,Journal of Crystal Growth 311,,,2009,,,459-462,https://cir.nii.ac.jp/crid/1010000782053706639,