著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
福島 誉史 and 田中 徹 and 小柳 光正,Self-Assembly of Chip-Size Components with Cavity Structures : High-Precision Alignment and Direct Bonding without Thermal Compression for Hetero Integration,Micromachines,,,2010,Vol.2,,49-68,https://cir.nii.ac.jp/crid/1010000782064225303,