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A Newly Developed Three-Dimensional Profile Scanner with Nanometer Spatial Resolution
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- SHINNO Hidenori
- 東京工業大学
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- YOSHIOKA Hayato
- 東京工業大学
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- SAWANO Hiroshi
- 東京工業大学
Bibliographic Information
- Title
- A Newly Developed Three-Dimensional Profile Scanner with Nanometer Spatial Resolution
- Author
- Shinno Hidenori, Yoshioka Hayato, Gokan Toshimichi, Sawano Hiroshi
Journal
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- Cirp Annals-Manufacturing Technology
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Cirp Annals-Manufacturing Technology Vol.59, No.1 525-528, 2010
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Details 詳細情報について
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- CRID
- 1010000782065917699
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- Article Type
- journal article
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- Data Source
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- KAKEN
