Three-Dimensional Nano-Motion System for SPM-Based CMM, Journal of Advanced Mechanical Design
-
- SAWANO Hiroshi
- 東京工業大学
-
- YOSHIOKA Hayato
- 東京工業大学
Bibliographic Information
- Title
- Three-Dimensional Nano-Motion System for SPM-Based CMM, Journal of Advanced Mechanical Design
- Author
- Sawano Hiroshi, Gokan Toshimichi, Yoshioka Hayato, Shinno Hiden
Journal
-
- Systems and Manufacturing
-
Systems and Manufacturing Vol.4, No.6 1192-1200, 2010
- Tweet
Details
-
- CRID
- 1010000782065917700
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN