Three-Dimensional Nano-Motion System for SPM-Based CMM, Journal of Advanced Mechanical Design
書誌事項
- タイトル
- Three-Dimensional Nano-Motion System for SPM-Based CMM, Journal of Advanced Mechanical Design
- 著者
- Sawano Hiroshi, Gokan Toshimichi, Yoshioka Hayato, Shinno Hiden
収録刊行物
-
- Systems and Manufacturing
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Systems and Manufacturing Vol.4, No.6 1192-1200, 2010