著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) 澤野 宏 and 吉岡 勇人,"Three-Dimensional Nano-Motion System for SPM-Based CMM, Journal of Advanced Mechanical Design",Systems and Manufacturing,,,2010,"Vol.4, No.6",,1192-1200,https://cir.nii.ac.jp/crid/1010000782065917700,