Carbon nanowire formation in electron-energy controlled plasma produced by CH4/Ar rf discharges with small coaxial electrodes

Bibliographic Information

Title
Carbon nanowire formation in electron-energy controlled plasma produced by CH4/Ar rf discharges with small coaxial electrodes
Author
Keiji Ohara

Journal

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Details 詳細情報について

  • CRID
    1010000782070295071
  • Article Type
    journal article
  • Data Source
    • KAKEN

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