Carbon nanowire formation in electron-energy controlled plasma produced by CH4/Ar rf discharges with small coaxial electrodes
書誌事項
- タイトル
- Carbon nanowire formation in electron-energy controlled plasma produced by CH4/Ar rf discharges with small coaxial electrodes
- 著者
- Keiji Ohara
収録刊行物
-
- Diamond & Related Materials
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Diamond & Related Materials 19 908-910, 2010