Effects of the inclination direction of vicinal m-plane sapphire substrates on the crystal quality of m-plane GaN film

Bibliographic Information

Title
Effects of the inclination direction of vicinal m-plane sapphire substrates on the crystal quality of m-plane GaN film
Author
Cho, Y ; Choi, S ; Kil, GS ; Lee, HJ ; Yao, T ; Yoo, J ; Kwon, J ; Chang, J
Published
2011
Resource Type
journal article

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Details 詳細情報について

  • CRID
    1010000782070657920
  • Article Type
    journal article
  • Data Source
    • KAKEN

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