Local-stress induced trap states in SOI layers with different levels of roughness at SOI/BOX interfaces

Bibliographic Information

Title
Local-stress induced trap states in SOI layers with different levels of roughness at SOI/BOX interfaces
Author
Y. Nakajima, Y. Watanabe, T. Hanajiri, T. Toyabe, and T. Sugano
Published
2011
Resource Type
journal article

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Details 詳細情報について

  • CRID
    1010000782075625474
  • Article Type
    journal article
  • Data Source
    • KAKEN

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