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Local-stress induced trap states in SOI layers with different levels of roughness at SOI/BOX interfaces
Bibliographic Information
- Title
- Local-stress induced trap states in SOI layers with different levels of roughness at SOI/BOX interfaces
- Author
- Y. Nakajima, Y. Watanabe, T. Hanajiri, T. Toyabe, and T. Sugano
- Published
- 2011
- Resource Type
- journal article
Journal
-
- IEEE Electron Device Lett.
-
IEEE Electron Device Lett. 32 4451-7, 2011
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Details 詳細情報について
-
- CRID
- 1010000782075625474
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
