Low-pressure HVPE growth of crack-free thick AlN on a trench-patterned AlN template

Bibliographic Information

Title
Low-pressure HVPE growth of crack-free thick AlN on a trench-patterned AlN template
Author
Y. Katagiri, S. Kishino, K. Okuura, H. Miyake and K. Hiramatsu

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Details 詳細情報について

  • CRID
    1010000782080956810
  • Article Type
    journal article
  • Data Source
    • KAKEN

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