Effect of post annealing on MgO thin film prepared on silicon(001) substrate in high oxygen pressure and high substrate temperature by pulsed laser deposition
Bibliographic Information
- Title
- Effect of post annealing on MgO thin film prepared on silicon(001) substrate in high oxygen pressure and high substrate temperature by pulsed laser deposition
- Author
- Satoru Kaneko, Kensuke Akiyama, Takeshi Ito, Manabu Yasui, Takeshi Ozawa, Masayasu Soga, Yu Motoizumi and Mamoru Yoshimoto
Journal
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- Materials Science and Engineering
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Materials Science and Engineering Vol.18 2011
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Details 詳細情報について
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- CRID
- 1010000782080981378
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- Article Type
- journal article
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- Data Source
-
- KAKEN
