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Deposition and wear resistance of composite TiBC-SiC coatings on Si wafer by thermal plasma CVD
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- SHIMADA Shiro
- 北海道大学
Bibliographic Information
- Title
- Deposition and wear resistance of composite TiBC-SiC coatings on Si wafer by thermal plasma CVD
- Author
- Shiro SHIMADA, Yusuke FUJI, Hajime KIYONO, Jiro TSUJINO, Isao YAMAZAKI
Journal
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- Journal of Ceramic Society of Japan 117
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Journal of Ceramic Society of Japan 117 415-420, 2009
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Details 詳細情報について
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- CRID
- 1010000782082055169
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- Article Type
- journal article
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- Data Source
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- KAKEN