Formation behavior and adhesion property of metallic Mn layer on porous SiOC by chemical vapor deposition
-
- ANDO Daisuke
- 東北大学
-
- SUTOU Yuji
- 東北大学
Bibliographic Information
- Title
- Formation behavior and adhesion property of metallic Mn layer on porous SiOC by chemical vapor deposition
- Author
- Yoshiyuki Tsuchiya, Daisuke Ando, Yuji Sutou, and Junichi Koike
Journal
-
- Japanese Journal of Applied Physics
-
Japanese Journal of Applied Physics 53 2014
- Tweet
Details 詳細情報について
-
- CRID
- 1010000782103912322
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
