A Multi-probe Measurement Method to Evaluate the Yaw and Straightness Errors of XY Stage on High Precision CMM
書誌事項
- タイトル
- A Multi-probe Measurement Method to Evaluate the Yaw and Straightness Errors of XY Stage on High Precision CMM
- 著者
- Ping Yang, Shusaku Shibata, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji
収録刊行物
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- Key Engineering Materials
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Key Engineering Materials 447-448 590-594, 2010
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詳細情報
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- CRID
- 1010000782105499033
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- 資料種別
- journal article
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- データソース種別
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- KAKEN