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A Multi-probe Measurement Method to Evaluate the Yaw and Straightness Errors of XY Stage on High Precision CMM

Bibliographic Information

Title
A Multi-probe Measurement Method to Evaluate the Yaw and Straightness Errors of XY Stage on High Precision CMM
Author
Ping Yang, Shusaku Shibata, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji

Journal

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Details

  • CRID
    1010000782105499033
  • Article Type
    journal article
  • Data Source
    • KAKEN

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