著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) 高橋 哲 and 高増 潔 and 佐藤 理,A Multi-probe Measurement Method to Evaluate the Yaw and Straightness Errors of XY Stage on High Precision CMM,Key Engineering Materials,,,2010,447-448,,590-594,https://cir.nii.ac.jp/crid/1010000782105499033,