著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Application of Thermal Plasma Jet Irradiation to Crystallization and Gate Insulator Improvement for High-Performance Thin-Film Transistor Fabrication,Jpn.J.Appl.Phys.,,,2011,50,,,https://cir.nii.ac.jp/crid/1010000782110617856,