[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Preliminary Investigation on Pulse Laser Deposited AlN for FBAR Application

Bibliographic Information

Title
Preliminary Investigation on Pulse Laser Deposited AlN for FBAR Application
Author
Z.P.Wang, 他2名

Journal

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Details

  • CRID
    1010000782134178570
  • Article Type
    journal article
  • Data Source
    • KAKEN

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