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Room Temperature Direct Bonding Using Fluorine Containing Plasma Activation
Bibliographic Information
- Title
- Room Temperature Direct Bonding Using Fluorine Containing Plasma Activation
- Author
- C.Wang and T.Suga
- Published
- 2011
- Resource Type
- journal article
Journal
-
- Journal of The Electrochemical Society
-
Journal of The Electrochemical Society vol.158 525-529, 2011
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Details 詳細情報について
-
- CRID
- 1010000782145025921
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
