[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Hydrogen isotope tracer experiment in a-C:H film deposition: Reactive RF magnetron sputtering with CH_4 and D_2

Bibliographic Information

Title
Hydrogen isotope tracer experiment in a-C:H film deposition: Reactive RF magnetron sputtering with CH_4 and D_2
Author
D. Sekiba, N. Takemoto, M. Okada, S. Ishii, T. Sakurai, K. Akimoto

Journal

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Details

  • CRID
    1010000782180358273
  • Article Type
    journal article
  • Data Source
    • KAKEN

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