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Highly sensitive analysis for surface contaminants by Ar gas cluster SIMS
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- MORITANI Kousuke
- 兵庫県立大学
Bibliographic Information
- Title
- Highly sensitive analysis for surface contaminants by Ar gas cluster SIMS
- Author
- Kousuke Moritani, Motohiro Tanaka, Norio Inui, Kozo Mochiji
- Published
- 2013
- Resource Type
- journal article
Journal
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- Surf. Interface Anal.
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Surf. Interface Anal. Vol. 45 143-146, 2013
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Details 詳細情報について
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- CRID
- 1010000782182959361
-
- Web Site
- http://10.1002/sia.5008
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN

