Microfabrication on Teflon surface by MeV-proton-microbeam and keV-nitrogen-ion-beam irradiation
Bibliographic Information
- Title
- Microfabrication on Teflon surface by MeV-proton-microbeam and keV-nitrogen-ion-beam irradiation
- Author
- Akane Kitamura (Ogawa)
Journal
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- Nuclear Instruments and Methods in Physics Research Section B
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Nuclear Instruments and Methods in Physics Research Section B 未定 2013
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Details 詳細情報について
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- CRID
- 1010000782188060945
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- Article Type
- journal article
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- Data Source
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- KAKEN