- Integration of CiNii Books functions for fiscal year 2025 has completed
- Trial version of CiNii Research Knowledge Graph Search feature is available on CiNii Labs
- 【Updated on November 26, 2025】Regarding the recording of “Research Data” and “Evidence Data”
- Start the collection of all publicly IRDB content
- Incorporate Research Data from KAKEN
Consideration of Femtosecond Laser-induced Effect on Semiconductor Material SiC Substrate for CMP Processing
-
- KUROKAWA Syuhei
- 九州大学
-
- DOI Toshiro
- 九州大学
-
- SANO Yasuhisa
- 大阪大学
-
- AIDA Hideo
- 並木精密宝石(株)
-
- OHNISHI Osamu
- 宮崎大学
-
- UNEDA Michio
- 金沢工業大学
Bibliographic Information
- Title
- Consideration of Femtosecond Laser-induced Effect on Semiconductor Material SiC Substrate for CMP Processing
- Author
- hengwu WANG, Syuhei KUROKAWA, Toshiro DOI, Yasuhisa SANO, Hideo AIDA, Osamu OHNISHI, Michio UNEDA, Koki OYAMA, Terutake HAYASHI, Ji ZHANG, Asakawa EIJI
- Published
- 2015
- Resource Type
- journal article
Journal
-
- Applied Mechanics and Materials
-
Applied Mechanics and Materials 799-800 458-462, 2015
- Tweet
Details 詳細情報について
-
- CRID
- 1010000782191819014
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
