{"@context":{"@vocab":"https://cir.nii.ac.jp/schema/1.0/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/","foaf":"http://xmlns.com/foaf/0.1/","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","datacite":"https://schema.datacite.org/meta/kernel-4/","ndl":"http://ndl.go.jp/dcndl/terms/","jpcoar":"https://github.com/JPCOAR/schema/blob/master/2.0/"},"@id":"https://cir.nii.ac.jp/crid/1010000782191819014.json","@type":"Article","resourceType":"学術雑誌論文(journal article)","dc:title":[{"@language":"ja","@value":"Consideration of Femtosecond Laser-induced Effect on Semiconductor Material SiC Substrate for CMP Processing"}],"creator":[{"@id":"https://cir.nii.ac.jp/crid/1420282801202474368","@type":"Researcher","personIdentifier":[{"@type":"KAKEN_RESEARCHERS","@value":"90243899"},{"@type":"NRID","@value":"1000090243899"},{"@type":"NRID","@value":"9000080998007"},{"@type":"NRID","@value":"9000014637497"},{"@type":"NRID","@value":"9000347205749"},{"@type":"NRID","@value":"9000303645144"},{"@type":"NRID","@value":"9000330670773"},{"@type":"NRID","@value":"9000401804932"},{"@type":"NRID","@value":"9000409029507"},{"@type":"NRID","@value":"9000406374881"},{"@type":"NRID","@value":"9000258651206"},{"@type":"NRID","@value":"9000408582780"},{"@type":"NRID","@value":"9000408893748"},{"@type":"NRID","@value":"9000258658033"},{"@type":"NRID","@value":"9000019949284"},{"@type":"NRID","@value":"9000406374899"},{"@type":"NRID","@value":"9000406374924"},{"@type":"NRID","@value":"9000405706798"},{"@type":"NRID","@value":"9000069654258"},{"@type":"NRID","@value":"9000386210649"},{"@type":"NRID","@value":"9000390887872"},{"@type":"NRID","@value":"9000283814830"},{"@type":"NRID","@value":"9000283821284"},{"@type":"NRID","@value":"9000402019953"},{"@type":"NRID","@value":"9000401806022"},{"@type":"NRID","@value":"9000408582793"},{"@type":"NRID","@value":"9000392172517"},{"@type":"NRID","@value":"9000020547187"},{"@type":"NRID","@value":"9000401773044"},{"@type":"NRID","@value":"9000392172379"},{"@type":"NRID","@value":"9000392172212"},{"@type":"NRID","@value":"9000392286095"},{"@type":"NRID","@value":"9000402077129"},{"@type":"NRID","@value":"9000404108165"},{"@type":"NRID","@value":"9000402077118"},{"@type":"NRID","@value":"9000256270479"},{"@type":"NRID","@value":"9000073581559"},{"@type":"NRID","@value":"9000347174959"},{"@type":"NRID","@value":"9000240088786"},{"@type":"NRID","@value":"9000401999856"},{"@type":"NRID","@value":"9000398256342"},{"@type":"NRID","@value":"9000406374896"},{"@type":"NRID","@value":"9000406374876"},{"@type":"NRID","@value":"9000256262887"},{"@type":"NRID","@value":"9000283818887"},{"@type":"NRID","@value":"9000406374884"},{"@type":"NRID","@value":"9000392273474"},{"@type":"NRID","@value":"9000392273424"},{"@type":"NRID","@value":"9000378661768"},{"@type":"NRID","@value":"9000020129166"},{"@type":"NRID","@value":"9000403559998"},{"@type":"NRID","@value":"9000402003630"},{"@type":"NRID","@value":"9000403165251"},{"@type":"NRID","@value":"9000258008768"},{"@type":"NRID","@value":"9000020081501"},{"@type":"NRID","@value":"9000402076569"},{"@type":"NRID","@value":"9000392273457"},{"@type":"NRID","@value":"9000242139134"},{"@type":"NRID","@value":"9000315144194"},{"@type":"NRID","@value":"9000402006890"},{"@type":"NRID","@value":"9000402019701"},{"@type":"NRID","@value":"9000406183100"},{"@type":"NRID","@value":"9000072387456"},{"@type":"NRID","@value":"9000020081584"},{"@type":"NRID","@value":"9000408893684"},{"@type":"NRID","@value":"9000060702077"},{"@type":"NRID","@value":"9000411089341"},{"@type":"NRID","@value":"9000398257189"},{"@type":"NRID","@value":"9000402076730"},{"@type":"NRID","@value":"9000398793957"},{"@type":"NRID","@value":"9000257734350"},{"@type":"NRID","@value":"9000019950019"},{"@type":"NRID","@value":"9000365107967"},{"@type":"NRID","@value":"9000401805100"},{"@type":"NRID","@value":"9000401770849"},{"@type":"NRID","@value":"9000398253058"},{"@type":"NRID","@value":"9000392273436"},{"@type":"NRID","@value":"9000240072055"},{"@type":"NRID","@value":"9000399345641"},{"@type":"NRID","@value":"9000404107302"},{"@type":"NRID","@value":"9000398255616"},{"@type":"NRID","@value":"9000019059159"},{"@type":"NRID","@value":"9000019964560"},{"@type":"NRID","@value":"9000365107971"},{"@type":"NRID","@value":"9000312256764"},{"@type":"NRID","@value":"9000347174964"},{"@type":"NRID","@value":"9000413783571"},{"@type":"NRID","@value":"9000401802766"},{"@type":"NRID","@value":"9000398258107"},{"@type":"NRID","@value":"9000402246986"},{"@type":"NRID","@value":"9000250173415"},{"@type":"RESEARCHMAP","@value":"https://researchmap.jp/Qdai-mech-kur2020"}],"foaf:name":[{"@language":"ja","@value":"黒河 周平"},{"@language":"en","@value":"KUROKAWA Syuhei"}],"jpcoar:affiliationName":[{"@language":"ja","@value":"九州大学"}]},{"@id":"https://cir.nii.ac.jp/crid/1030003658743471232","@type":"Researcher","personIdentifier":[{"@type":"KAKEN_RESEARCHERS","@value":"30207675"},{"@type":"NRID","@value":"1000030207675"},{"@type":"NRID","@value":"9000271160643"},{"@type":"NRID","@value":"9000315144193"},{"@type":"NRID","@value":"9000288818122"}],"foaf:name":[{"@language":"ja","@value":"土肥 俊郎"},{"@language":"en","@value":"DOI Toshiro"}],"jpcoar:affiliationName":[{"@language":"ja","@value":"九州大学"}]},{"@id":"https://cir.nii.ac.jp/crid/1420564276162587008","@type":"Researcher","personIdentifier":[{"@type":"KAKEN_RESEARCHERS","@value":"40252598"},{"@type":"NRID","@value":"1000040252598"},{"@type":"ORCID","@value":"0000-0002-1767-922X"},{"@type":"NRID","@value":"9000414844144"},{"@type":"NRID","@value":"9000414844129"},{"@type":"NRID","@value":"9000383166265"},{"@type":"NRID","@value":"9000283813933"},{"@type":"NRID","@value":"9000347153269"},{"@type":"NRID","@value":"9000283825848"},{"@type":"NRID","@value":"9000347174951"},{"@type":"NRID","@value":"9000021298842"},{"@type":"NRID","@value":"9000258646924"},{"@type":"NRID","@value":"9000258655802"},{"@type":"NRID","@value":"9000258659312"},{"@type":"NRID","@value":"9000047627829"},{"@type":"NRID","@value":"9000080963680"},{"@type":"NRID","@value":"9000238859669"},{"@type":"NRID","@value":"9000347205572"},{"@type":"NRID","@value":"9000347206253"},{"@type":"NRID","@value":"9000401790843"},{"@type":"NRID","@value":"9000258658039"},{"@type":"NRID","@value":"9000009896604"},{"@type":"NRID","@value":"9000308048905"},{"@type":"NRID","@value":"9000283821279"},{"@type":"NRID","@value":"9000402048690"},{"@type":"NRID","@value":"9000401744539"},{"@type":"NRID","@value":"9000391990604"},{"@type":"NRID","@value":"9000007520145"},{"@type":"NRID","@value":"9000383166555"},{"@type":"NRID","@value":"9000404109087"},{"@type":"NRID","@value":"9000392174496"},{"@type":"NRID","@value":"9000020607782"},{"@type":"NRID","@value":"9000414844117"},{"@type":"NRID","@value":"9000345276982"},{"@type":"NRID","@value":"9000347177253"},{"@type":"NRID","@value":"9000398794149"},{"@type":"NRID","@value":"9000347216944"},{"@type":"NRID","@value":"9000347174958"},{"@type":"NRID","@value":"9000401720528"},{"@type":"NRID","@value":"9000413742151"},{"@type":"NRID","@value":"9000240072058"},{"@type":"NRID","@value":"9000000111061"},{"@type":"NRID","@value":"9000025078883"},{"@type":"NRID","@value":"9000402784792"},{"@type":"NRID","@value":"9000377379719"},{"@type":"NRID","@value":"9000356652745"},{"@type":"NRID","@value":"9000401790835"},{"@type":"NRID","@value":"9000399852432"},{"@type":"NRID","@value":"9000363906358"},{"@type":"NRID","@value":"9000315144191"},{"@type":"NRID","@value":"9000402020228"},{"@type":"NRID","@value":"9000401678352"},{"@type":"NRID","@value":"9000402077350"},{"@type":"NRID","@value":"9000054924749"},{"@type":"NRID","@value":"9000107389604"},{"@type":"NRID","@value":"9000402027337"},{"@type":"NRID","@value":"9000402012919"},{"@type":"NRID","@value":"9000404109124"},{"@type":"NRID","@value":"9000107390345"},{"@type":"NRID","@value":"9000347203942"},{"@type":"NRID","@value":"9000406355900"},{"@type":"NRID","@value":"9000329414644"},{"@type":"NRID","@value":"9000241472497"},{"@type":"NRID","@value":"9000329414651"},{"@type":"NRID","@value":"9000411115430"},{"@type":"NRID","@value":"9000283187173"},{"@type":"NRID","@value":"9000257784483"},{"@type":"NRID","@value":"9000258177349"},{"@type":"NRID","@value":"9000356652429"},{"@type":"NRID","@value":"9000107390337"},{"@type":"NRID","@value":"9000283810118"},{"@type":"NRID","@value":"9000402005760"},{"@type":"NRID","@value":"9000401766760"},{"@type":"NRID","@value":"9000308381354"},{"@type":"NRID","@value":"9000336380350"},{"@type":"RESEARCHMAP","@value":"https://researchmap.jp/read0042804"}],"foaf:name":[{"@language":"ja","@value":"佐野 泰久"},{"@language":"en","@value":"SANO Yasuhisa"}],"jpcoar:affiliationName":[{"@language":"ja","@value":"大阪大学"}]},{"@id":"https://cir.nii.ac.jp/crid/1030285133846030080","@type":"Researcher","personIdentifier":[{"@type":"NRID","@value":"9000403165045"},{"@type":"NRID","@value":"9000327096723"},{"@type":"NRID","@value":"9000401802625"},{"@type":"NRID","@value":"9000401992390"},{"@type":"NRID","@value":"9000402004320"},{"@type":"NRID","@value":"9000401806028"},{"@type":"NRID","@value":"9000304695581"},{"@type":"NRID","@value":"9000315144174"},{"@type":"NRID","@value":"9000402006882"},{"@type":"NRID","@value":"9000401806014"},{"@type":"NRID","@value":"9000398794125"},{"@type":"NRID","@value":"9000024982169"},{"@type":"NRID","@value":"9000402003489"},{"@type":"NRID","@value":"9000025009460"},{"@type":"NRID","@value":"9000258008771"},{"@type":"NRID","@value":"9000315144195"},{"@type":"NRID","@value":"9000402006896"},{"@type":"NRID","@value":"9000258739814"},{"@type":"NRID","@value":"9000288818126"},{"@type":"NRID","@value":"9000401802776"},{"@type":"NRID","@value":"9000401803457"},{"@type":"NRID","@value":"9000018880186"},{"@type":"NRID","@value":"9000403165501"},{"@type":"RESEARCHMAP","@value":"https://researchmap.jp/7000022298"}],"foaf:name":[{"@language":"ja","@value":"會田 英雄"},{"@language":"en","@value":"AIDA Hideo"}],"jpcoar:affiliationName":[{"@language":"ja","@value":"並木精密宝石(株)"}]},{"@id":"https://cir.nii.ac.jp/crid/1420845751162708224","@type":"Researcher","personIdentifier":[{"@type":"KAKEN_RESEARCHERS","@value":"50315107"},{"@type":"NRID","@value":"1000050315107"}],"foaf:name":[{"@language":"ja","@value":"大西 修"},{"@language":"en","@value":"OHNISHI Osamu"}],"jpcoar:affiliationName":[{"@language":"ja","@value":"宮崎大学"}]},{"@id":"https://cir.nii.ac.jp/crid/1420001326204838656","@type":"Researcher","personIdentifier":[{"@type":"KAKEN_RESEARCHERS","@value":"00298324"},{"@type":"NRID","@value":"1000000298324"},{"@type":"NRID","@value":"9000283813571"},{"@type":"NRID","@value":"9000283821118"},{"@type":"NRID","@value":"9000403165046"},{"@type":"NRID","@value":"9000283320739"},{"@type":"NRID","@value":"9000258651161"},{"@type":"NRID","@value":"9000258658030"},{"@type":"NRID","@value":"9000258655868"},{"@type":"NRID","@value":"9000258655896"},{"@type":"NRID","@value":"9000020119420"},{"@type":"NRID","@value":"9000020055137"},{"@type":"NRID","@value":"9000410039997"},{"@type":"NRID","@value":"9000392292200"},{"@type":"NRID","@value":"9000258655844"},{"@type":"NRID","@value":"9000019949280"},{"@type":"NRID","@value":"9000347175136"},{"@type":"NRID","@value":"9000327096719"},{"@type":"NRID","@value":"9000410040374"},{"@type":"NRID","@value":"9000405913300"},{"@type":"NRID","@value":"9000392297414"},{"@type":"NRID","@value":"9000258008248"},{"@type":"NRID","@value":"9000258634372"},{"@type":"NRID","@value":"9000283812294"},{"@type":"NRID","@value":"9000283811430"},{"@type":"NRID","@value":"9000283824473"},{"@type":"NRID","@value":"9000347203779"},{"@type":"NRID","@value":"9000345276952"},{"@type":"NRID","@value":"9000347175099"},{"@type":"NRID","@value":"9000414253822"},{"@type":"NRID","@value":"9000401806024"},{"@type":"NRID","@value":"9000258642448"},{"@type":"NRID","@value":"9000258639793"},{"@type":"NRID","@value":"9000004738898"},{"@type":"NRID","@value":"9000019951938"},{"@type":"NRID","@value":"9000020547155"},{"@type":"NRID","@value":"9000387904491"},{"@type":"NRID","@value":"9000283824509"},{"@type":"NRID","@value":"9000347205742"},{"@type":"NRID","@value":"9000345226076"},{"@type":"NRID","@value":"9000258655768"},{"@type":"NRID","@value":"9000022206115"},{"@type":"NRID","@value":"9000283814983"},{"@type":"NRID","@value":"9000347203022"},{"@type":"NRID","@value":"9000347177095"},{"@type":"NRID","@value":"9000315144171"},{"@type":"NRID","@value":"9000414846180"},{"@type":"NRID","@value":"9000402006878"},{"@type":"NRID","@value":"9000401806010"},{"@type":"NRID","@value":"9000258644611"},{"@type":"NRID","@value":"9000267850770"},{"@type":"NRID","@value":"9000262340793"},{"@type":"NRID","@value":"9000010383380"},{"@type":"NRID","@value":"9000365558459"},{"@type":"NRID","@value":"9000283826238"},{"@type":"NRID","@value":"9000314381450"},{"@type":"NRID","@value":"9000404108846"},{"@type":"NRID","@value":"9000406355473"},{"@type":"NRID","@value":"9000398794129"},{"@type":"NRID","@value":"9000258008285"},{"@type":"NRID","@value":"9000258647369"},{"@type":"NRID","@value":"9000258657973"},{"@type":"NRID","@value":"9000258655781"},{"@type":"NRID","@value":"9000020109416"},{"@type":"NRID","@value":"9000383164215"},{"@type":"NRID","@value":"9000283821209"},{"@type":"NRID","@value":"9000283826257"},{"@type":"NRID","@value":"9000347203973"},{"@type":"NRID","@value":"9000402006869"},{"@type":"NRID","@value":"9000398140904"},{"@type":"NRID","@value":"9000258655829"},{"@type":"NRID","@value":"9000020129195"},{"@type":"NRID","@value":"9000389943057"},{"@type":"NRID","@value":"9000345301957"},{"@type":"NRID","@value":"9000283826315"},{"@type":"NRID","@value":"9000283826311"},{"@type":"NRID","@value":"9000347177639"},{"@type":"NRID","@value":"9000413253929"},{"@type":"NRID","@value":"9000398141708"},{"@type":"NRID","@value":"9000398141079"},{"@type":"NRID","@value":"9000410486181"},{"@type":"NRID","@value":"9000391989879"},{"@type":"NRID","@value":"9000283320868"},{"@type":"NRID","@value":"9000258008767"},{"@type":"NRID","@value":"9000256272001"},{"@type":"NRID","@value":"9000258655878"},{"@type":"NRID","@value":"9000362235156"},{"@type":"NRID","@value":"9000398140977"},{"@type":"NRID","@value":"9000392297419"},{"@type":"NRID","@value":"9000283320812"},{"@type":"NRID","@value":"9000258007949"},{"@type":"NRID","@value":"9000019949325"},{"@type":"NRID","@value":"9000283809000"},{"@type":"NRID","@value":"9000283815041"},{"@type":"NRID","@value":"9000402006892"},{"@type":"NRID","@value":"9000401806001"},{"@type":"NRID","@value":"9000399782770"},{"@type":"NRID","@value":"9000365558472"},{"@type":"NRID","@value":"9000347545324"},{"@type":"NRID","@value":"9000283817295"},{"@type":"NRID","@value":"9000283812534"},{"@type":"NRID","@value":"9000283806864"},{"@type":"NRID","@value":"9000283818898"},{"@type":"NRID","@value":"9000404109568"},{"@type":"NRID","@value":"9000258007902"},{"@type":"NRID","@value":"9000258636433"},{"@type":"NRID","@value":"9000258658011"},{"@type":"NRID","@value":"9000258657986"},{"@type":"NRID","@value":"9000258655817"},{"@type":"NRID","@value":"9000410961193"},{"@type":"NRID","@value":"9000006325050"},{"@type":"NRID","@value":"9000365558420"},{"@type":"NRID","@value":"9000283819309"},{"@type":"NRID","@value":"9000345276976"},{"@type":"NRID","@value":"9000398138040"},{"@type":"NRID","@value":"9000402399256"},{"@type":"NRID","@value":"9000258657994"},{"@type":"NRID","@value":"9000242694830"},{"@type":"NRID","@value":"9000017462382"},{"@type":"NRID","@value":"9000399171666"},{"@type":"NRID","@value":"9000383165020"},{"@type":"NRID","@value":"9000283824545"},{"@type":"NRID","@value":"9000283824534"},{"@type":"NRID","@value":"9000347206374"},{"@type":"NRID","@value":"9000345226361"},{"@type":"NRID","@value":"9000409598094"},{"@type":"NRID","@value":"9000410040359"},{"@type":"NRID","@value":"9000258008090"},{"@type":"NRID","@value":"9000258648166"},{"@type":"NRID","@value":"9000025062832"},{"@type":"NRID","@value":"9000021443259"},{"@type":"NRID","@value":"9000019954194"},{"@type":"NRID","@value":"9000365006202"},{"@type":"NRID","@value":"9000283826250"},{"@type":"NRID","@value":"9000283824527"},{"@type":"NRID","@value":"9000345283081"},{"@type":"NRID","@value":"9000402014885"},{"@type":"NRID","@value":"9000404107256"},{"@type":"NRID","@value":"9000410486102"},{"@type":"NRID","@value":"9000258008545"},{"@type":"NRID","@value":"9000258656778"},{"@type":"NRID","@value":"9000258656436"},{"@type":"NRID","@value":"9000019964571"},{"@type":"NRID","@value":"9000283816681"},{"@type":"NRID","@value":"9000283821215"},{"@type":"NRID","@value":"9000283823214"},{"@type":"NRID","@value":"9000313614106"},{"@type":"NRID","@value":"9000347175073"},{"@type":"NRID","@value":"9000403165498"},{"@type":"NRID","@value":"9000258652319"},{"@type":"RESEARCHMAP","@value":"https://researchmap.jp/read_030303"}],"foaf:name":[{"@language":"ja","@value":"畝田 道雄"},{"@language":"en","@value":"UNEDA Michio"}],"jpcoar:affiliationName":[{"@language":"ja","@value":"金沢工業大学"}]}],"publication":{"prism:publicationName":[{"@language":"ja","@value":"Applied Mechanics and Materials"}],"prism:publicationDate":"2015","prism:volume":"799-800","prism:startingPage":"458","prism:endingPage":"462","jointInternationalResearch":"true"},"reviewed":"true","project":[{"@id":"https://cir.nii.ac.jp/crid/1040000782191819008","@type":"Project","projectIdentifier":[{"@type":"KAKEN","@value":"24226005"},{"@type":"JGN","@value":"JP24226005"},{"@type":"URI","@value":"https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-24226005/"}],"notation":[{"@language":"ja","@value":"究極デバイスとしてのダイヤモンド基板の革新的超精密加工プロセスへのブレークスルー"},{"@language":"en","@value":"Breakthrough in the ultra-precison polishing process of diamond substrates as an ulimate device"}]}],"dataSourceIdentifier":[{"@type":"KAKEN","@value":"PRODUCT-20391365"}]}