Consideration of Femtosecond Laser-induced Effect on Semiconductor Material SiC Substrate for CMP Processing
書誌事項
- タイトル
- Consideration of Femtosecond Laser-induced Effect on Semiconductor Material SiC Substrate for CMP Processing
- 著者
- hengwu WANG, Syuhei KUROKAWA, Toshiro DOI, Yasuhisa SANO, Hideo AIDA, Osamu OHNISHI, Michio UNEDA, Koki OYAMA, Terutake HAYASHI, Ji ZHANG, Asakawa EIJI
- 公開日
- 2015
- 資源種別
- journal article
収録刊行物
-
- Applied Mechanics and Materials
-
Applied Mechanics and Materials 799-800 458-462, 2015
