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Analysis fo sapphire-chemical mechanical polishing using digital image processing
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- UNEDA Michio
- 金沢工業大学
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- AIDA Hideo
- 並木精密宝石(株)
Bibliographic Information
- Title
- Analysis fo sapphire-chemical mechanical polishing using digital image processing
- Author
- Michio Uneda, Keiichi Takano, Koji Koyama, Hideo Aida, Ken-ichi Ishikawa
- Published
- 2016
- Resource Type
- journal article
Journal
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- Special issue on Micromechatronics ofr Information and Precision Equipment, Mechanical Engineering Journal of 2016 The Japan Society of Mechanical Ingineers
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Special issue on Micromechatronics ofr Information and Precision Equipment, Mechanical Engineering Journal of 2016 The Japan Society of Mechanical Ingineers 3（１） 1-11, 2016
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Details 詳細情報について
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- CRID
- 1010000782191819016
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- Article Type
- journal article
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- Data Source
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- KAKEN
