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Effects of carbon sources on deposition process of amorphous carbon film with plasma enhanced chemical vapor deposition, investigated with infrared spectroscopy: benzene and naphthalene
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- SHINOHARA Masanori
- 長崎大学
Bibliographic Information
- Title
- Effects of carbon sources on deposition process of amorphous carbon film with plasma enhanced chemical vapor deposition, investigated with infrared spectroscopy: benzene and naphthalene
- Author
- Shohei Yagi, Yujiro Taniguchi, Naoki Maruno, Masanori Shinohara, Yoshinobu Matsuda, Hiroshi Fujiyama
- Published
- 2014
- Resource Type
- journal article
Journal
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- Proceedoings of 8th International conference on reactive plasmas
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Proceedoings of 8th International conference on reactive plasmas 1 2014
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Details 詳細情報について
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- CRID
- 1010000782197806849
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- Article Type
- journal article
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- Data Source
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- KAKEN
