Effects of carbon sources on deposition process of amorphous carbon film with plasma enhanced chemical vapor deposition, investigated with infrared spectroscopy: benzene and naphthalene

Bibliographic Information

Title
Effects of carbon sources on deposition process of amorphous carbon film with plasma enhanced chemical vapor deposition, investigated with infrared spectroscopy: benzene and naphthalene
Author
Shohei Yagi, Yujiro Taniguchi, Naoki Maruno, Masanori Shinohara, Yoshinobu Matsuda, Hiroshi Fujiyama
Published
2014
Resource Type
journal article

Journal

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Details 詳細情報について

  • CRID
    1010000782197806849
  • Article Type
    journal article
  • Data Source
    • KAKEN

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