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Tilt-angle measurement of a sample stage using a capacitive liquid-based inclinometer.
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- YASUNAGA Takuo
- 九州工業大学
Bibliographic Information
- Title
- Tilt-angle measurement of a sample stage using a capacitive liquid-based inclinometer.
- Author
- Matoba, K., Takagi, J., Yasunaga, T., Jinnai, H. & Iwasaki, K.
- Published
- 2012
- Resource Type
- journal article
Journal
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- Journal of Electron Microscopy
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Journal of Electron Microscopy 61 193-198, 2012
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Details 詳細情報について
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- CRID
- 1010000782221615746
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- Article Type
- journal article
-
- Data Source
-
- KAKEN
