Cs-Corrected STEM Observation and Atomic Modeling of Grain Boundary Impurities of Very Narrow Cu Interconnect

Bibliographic Information

Title
Cs-Corrected STEM Observation and Atomic Modeling of Grain Boundary Impurities of Very Narrow Cu Interconnect
Author
Takatoshi Naganoz, Kunihiro Tamahashi, Yasushi Sasajima and Jin Onuki
Published
2013
Resource Type
journal article

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Details 詳細情報について

  • CRID
    1010000782228161672
  • Article Type
    journal article
  • Data Source
    • KAKEN

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