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Cs-Corrected STEM Observation and Atomic Modeling of Grain Boundary Impurities of Very Narrow Cu Interconnect
Bibliographic Information
- Title
- Cs-Corrected STEM Observation and Atomic Modeling of Grain Boundary Impurities of Very Narrow Cu Interconnect
- Author
- Takatoshi Naganoz, Kunihiro Tamahashi, Yasushi Sasajima and Jin Onuki
- Published
- 2013
- Resource Type
- journal article
Journal
-
- ECS Electrochemistry Letters
-
ECS Electrochemistry Letters 2 2013
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Details 詳細情報について
-
- CRID
- 1010000782228161672
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
