Cs-Corrected STEM Observation and Atomic Modeling of Grain Boundary Impurities of Very Narrow Cu Interconnect
書誌事項
- タイトル
- Cs-Corrected STEM Observation and Atomic Modeling of Grain Boundary Impurities of Very Narrow Cu Interconnect
- 著者
- Takatoshi Naganoz, Kunihiro Tamahashi, Yasushi Sasajima and Jin Onuki
- 公開日
- 2013
- 資源種別
- journal article
収録刊行物
-
- ECS Electrochemistry Letters
-
ECS Electrochemistry Letters 2 2013
