著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
高橋 篤司 and 小平 行秀,Multi Patterning Techniques for Manufacturability Enhancement in Optical Lithography,"Proc. the 2014 International Conference on Integrated Circuits, Design, and Verification (ICDV 2014)",,,2014,2014,,117-122,https://cir.nii.ac.jp/crid/1010000782240027806,