著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
角嶋 邦之,High-Mobility and Low-Carrier-Density Sputtered-MoS2 Film by Introducing Residual Sulfur during Low-Temperature in 3%-H2 Annealing for 3D-ICs,Japanese Journal of Applied Physics,,,2017,55,,,https://cir.nii.ac.jp/crid/1010000782278685213,