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Soft X-ray irradiation effect on the fluorinated DLC film,” Hiroki Takamatsu, Makoto Okada, Masahito Niibe,
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- Tagawa Masahito
- 神戸大学
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- 横田 久美子
- 神戸大学
Bibliographic Information
- Title
- Soft X-ray irradiation effect on the fluorinated DLC film,” Hiroki Takamatsu, Makoto Okada, Masahito Niibe,
- Author
- XiaoLong Zhou, Kenji Komatsu, Hidetoshi Saito, Hiroki Akasaka, Akihiko Saiga, Koji Tamada, Masahito Tagawa, Kumiko Yokota, Yuichi Furuyama, Kazuhiro Kanda,
- Published
- 2017
- Resource Type
- journal article
Journal
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- Diamond and Related Materials,
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Diamond and Related Materials, 79 14-20, 2017
- Tweet
Details 詳細情報について
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- CRID
- 1010000782287684865
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- Article Type
- journal article
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- Data Source
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- KAKEN
