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Preparation of hydrogenated diamond-like carbon films using high density pulsed plasmas of Ar/C2H2 and Ne/C2H2 mixture
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- KIMURA Takashi
- 名古屋工業大学
Bibliographic Information
- Title
- Preparation of hydrogenated diamond-like carbon films using high density pulsed plasmas of Ar/C2H2 and Ne/C2H2 mixture
- Author
- Takashi Kimura, Hikaru Kamata
- Published
- 2016
- Resource Type
- journal article
Journal
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- Japanese Journal of Applied Physics
-
Japanese Journal of Applied Physics 55 2016
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Details 詳細情報について
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- CRID
- 1010000782298790276
-
- Article Type
- journal article
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- Data Source
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- KAKEN
